GAS NAME
PURITY
BCl3
99.999% (5N)
BF3
99.995% (4N5)
C2H4
99.999% (5N)
C2HF5
99.99% (4N)
C3F6
99.9% (3N)
C3H6
99.97% (3N7)
C4F8
99.99% (4N), 99.999% (5N)
CF4
99.999% (5N)
CH2F2
99.99% (4N)
CH4
99.995% (4N5)
CHF3
99.999% (5N)
Cl2
99.999% (5N)
CO2
99.999% (5N)
HCl
99.999% (5N)
N2
99.9999% (6N)
N2O
99.9995% (5N5)
Ne
99.999% (5N)
NH3
99.9995% (5N5), 99.99999% (7N)
NO
99.95% (3N5)
O2
99.999% (5N)
SF6
99.999% (5N)
Si2H6
99.998% (4N8)
Si3H8
99.99% (4N)
Si4H10
95% (1N5)
SiCl4
99.99% (4N)
TCS
99.95% (3N5)
Xe
99.999% (5N)