GROUP
GAS NAME
Inert Gas Mix
0.5% O2/He
0.52% N2/He
1.2% He/N2
20% O2/N2
30% O2/He
4% H2/He
4% H2/N2
5% H2/He
PH3 Gas Mix
0.1% PH3/H2
0.1% PH3/N2
0.8% PH3/N2
1% PH3/H2
1% PH3/He
1% PH3/N2
10% PH3/N2
100ppmPH3/H2
15% PH3/H2
20% PH3/H2
3% PH3/N2
4% PH3/He
4.5% PH3/N2
5% PH3/N2
500ppmPH3/H2
50ppmPH3/H2
50ppmPH3/N2
55ppmPH3/H2
BCl3 Gas Mix
0.1% BCl3/He
0.1% BCl3/N2
1% BCl3/N2
Laser Gas Mix
0.4% Xe/Ne
1% F2/Ne
100ppmH2/Ne
4.5%HCl/0.9%H2/Ne
5%HCl/1%H2/94%Ne
B2H6 Gas Mix
1% B2H6/H2
1000ppmB2H6/H2
50ppmB2H6/H2
Process Gas Mix
10% GeH4/H2
2.75% C2H4/He
20% 1MS/H2
20% F2/N2
200ppmSi2H6/H2
200ppmSiH4/H2
4% CH4/Ar
5% 1MS/Ar
P-10 (10%CH4/Ar)