R&D of Precursor for Semiconductor Devices
Precursor Lab. researches and develops various precursors and process solutions used in manufacturing semiconductor devices. We are specially focusing on ALD/CVD precursors to deposit various films such as dielectrics, metals, semiconductors, and etc. Our laboratory is doing the best to provide the differentiated products and solutions to meet various customer's needs.
R&D Activities in Precursor Lab.
∙ Precursor Synthesis Lab. - Design of new precursors and synthesis
∙ Thin-Film Deposition Lab. - Evaluation of new precursors and development of deposition process
∙ Simulation Lab. - Simulation for design & synthesis of new precursors, deposition & etching process, and etc.
Synthesis Lab. Facilities
CVD/ALD & Measurement Equipments
To Product List
Inclusive and Valuable Growth Through Co-R&D With Various Customers
Precursor Lab. is also developing new precursors and solutions through the collaborative projects with our customers. We welcome and are ready to cooperate with customers at various R&D levels.
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